Leybold vacuum TURBOVAC Serie Gebrauchsanleitung Seite 26

Connections
Operating environment
TURBOVAC No additional cooling required if all
these conditions
Ambient temperature < 300C
50 D
No bakeout operations
High-vacuum pressure < 10-3mbar
Forevacuumpressure < 5-10-1mbar
50 Continuous operation at high-
vacuum pressure < 10-4mbar
Ambient temperature
151, 151 c,
361, 361 c
600, 600 c
1000, 1000 c
2 Connections
Caution
Unless appropriate
ments are
suitable for aggressive
or those containing
corrosive media the C version pump must
be operated with purge gas; when handling
media containing
must be installed.
Observe the information on media compati-
bility, to be found at the beginning of these
operating instructions.
Do not open the packaging until immediately prior to
installation.
Remove the covers and the blank flanges at the turbo-
molecular pump only just before installing, to ensure that
the TURBOVAC is installed under the cleanest
conditions.
When moving the heavier pumps, the lower surfaces on
the base flange are suitable for accepting a lifting fork;
see Fig. 3.
26
and cooling
Air or water cooling required
are satisfied
Ambient temperature 30 to 400C
Bakeout operations
High-vacuum pressure 10-3to
10-2 mbar
Forevacuum pressure 510-1 to
2 mbar
Bakeout at ambient temperature
< 400 C
< 500C Continuous operation at high-vacuum
pressure > 10-4mbar
Rapid-cycling operation
Bakeout
< 350C
High-vacuum pressure < 10-3mbar
and ambient temperature < 450C
Bakeout at ambient temperature
< 350C
high-vacuum pressure < 10-3mbar
and ambient temperature < 450C
Bakeout at ambient temperature
< 350C
high-vacuum pressure < 10-4mbar
and ambient temperature < 450C
accessories and attach-
used, the TURBOVAC
or corrosive
dust. When handling
dust, a fine-mesh
possible
at ambient temperature
or
or
30
35
40
45
50
is not
media,
filter
Fig. 3 Movement
Caution
Do not stand below the TURBOVACpump while it is being
connected to or detached from the system.
Water cooling required if any one Of these
conditions prevails
Ambient temperature > 400C
Bakeout operations
High-vacuum pressure> 5-10-2 mbar
Forevacuum pressure
Ambient temperature > 500C
Back-out at ambient temperature > 400C
Bakeout at ambient temperature > 350C
High-vacuum pressure > 10-3mbar
Ambient temperature > 450C
Bakeout at ambient temperature > 350C
High-vacuum pressure > 10-3mbar
Ambient temperature > 450C
Bakeout at ambient temperature > 350C
High-vacuum pressure > 10-4mbar
Ambient temperature > 450C
mbar
86
10-4
10-3
95
10-2
104
113
122 5•10-1
2
Take care not to damage
coolant connections during movement.
> 2 mbar
Torr
8•10-5
10-4
8•10-3
4-10-1
1.5
the plugs and
GA 05.118/5 - 12/97